UVISEL 2: The ultimate solution to every challenge in thin-film measurement

HORIBA Scientific has invented the new generation of scientific spectroscopic ellipsometer that delivers the highest level of performance for nano and micro layer characterization.

The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family.

The UVISEL 2 features a patented sample vision coupled with automated spot selection for accurate positioning of the measurement spot and region on the sample.

The UVISEL 2 integrates the world’s smallest patented achromatic spot size of 35μm capable of covering a large spectral range from FUV to NIR for measurement of very small sample areas.

Driven by the DeltaPsi2 software, the UVISEL 2 is simple to operate and has the performance required characterizing all current materials as well as the next generation materials and structures.

HORIBA Scientific started with what has proven to be the most accurate and sensitive ellipsometer, the UVISEL, and redesigned and improved everything to deliver an instrument with a remarkably higher specification than any other instrument.

Key Features

  • Scanning spectroscopic phase modulated ellipsometer 190 – 880 nm (NIR extension 880 – 2100 nm)
  • Automated 200x200x40 mm XYZ stage, with automated sample tilt alignment
  • Automated vision system with choice of 8 microspot sizes down to 35 micron
  • Automated goniometer 35 – 90°