Ellipsometry is a surface sensitive, non-destructive, and non-intrusive optical metrology technique widely used to determine thin film thickness and optical constants (n, k). Ellipsometry is ideal for a wide range of thin film applications from fields such as semiconductors, solar, optoelectronics, optical and functional coatings, surface chemistry, and biotechnology. For more information on thin film characterisation and analysis using spectroscopic ellipsometry, please visit the Horiba Scientific Ellipsometry Academy, which provides a tutorial, webinars and videos, and some FAQ’s to help you with your thin film analysis.

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Imaging Ellipsometer

The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and microscopy to enable surface characterization with lateral resolution as small as 1 micron. This enables...

3D surface metrology describes the measurement and characterisation of micro- and nano-scale featuers on natural or manufactured surfaces. Sensofar Metrology provides high end non-contact 3D surface profilers based on complementary confocal, interferometry and focus variation techniques (thus ‘3-in-1’). As a result, the systems provide unrivalled versatility for optical measurements of structure and texture across varying surface scales, and even deliver areal surface roughness to ISO 25178 standards. From complete set-ups for industry, R&D and standards laboratories, to flexible and fast in-line metrology solutions with small footprint for production processes.

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S lynx

S lynx is a new non-contact 3D surface profiler designed for use in industry and research. It has been designed as a compact and versatile system. S lynx is able to measure differing textures, structures,...

With over 100 years of combined SPM research experience, AIST-NT’s range of instruments feature outstanding mechanical stability enabling atomic resolution imaging without vibration isolation. Combined with the low-noise registration system, unique scanner, advanced electronics and smart scanning procedures, the SmartSPM, OmegaScope and CombiScope make routine work of even the most challenging of applications.

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